UV | RMI Optics

Ultraviolet Optics for Precision Imaging & Photolithography

Materials: Fused Silica, CaF2, MgF2, BaF2

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High-Performance Ultraviolet Optics for Medical, Semiconductor & Research Applications

RMI’s ultraviolet optics are engineered for demanding environments in medical diagnostics, semiconductor photolithography, and scientific spectroscopy. Designed for optimal transmission and durability across the UV and Deep UV spectrum, our components deliver accurate, repeatable results from 193nm to 355nm.

Coating Types

Narrowband Anti Reflection coatings NAR 266 nm

RMI Ultraviolet (193-400 nm) Coatings Standard Specifications

193 nm ≤ λ ≤ 400 nm

Narrowband Anti Reflection coatings, often referred to as "V" coatings, substantially reduce surface reflectance at the specified center wavelength.

These all-dielectric coatings are sensitive to polarization, wavelength and angle of incidence. They are durable and highly resistant to laser damage.

Broadband RMAX High Reflection coatings LHR 248 nm

193 nm ≤ λ ≤ 400 nm

Broadband RMAX High Reflection coatings are designed to provide high reflectance over a broad spectral region. These all dielectric coatings exhibit very low loss due to absorption and scatter.

They are less sensitive to angle of incidence than laser-line RMAX mirror coatings, which makes them well suited for the steeply curved surfaces of high numerical aperture mirrors, or for applications in which it is necessary to vary the angle of incidence.

193 nm ≤ λ ≤ 400 nm

Partial Reflection coatings are widely used for beamsplitting, beam sampling, and laser output coupling. They divide an incident, monochromatic beam into reflected and transmitted components with the specified intensity ratio.

These coatings can be designed for high power applications, using special materials that can withstand greater power levels, as well as for Excimer lasers, which require resistance to the corrosive properties of Excimer gases, making them ideal for intracavity use.

All dielectric coatings are sensitive to polarization, wavelength, and angle of incidence.

Partial Reflection coatings PAR 355 nm 50% R

Non-Polarizing Cube and Plate Beamsplitters PCB 355 nm

Non-Polarizing Cube and Plate Beamsplitters

193 nm ≤ λ ≤ 400 nm

Polarizing and Non-Polarizing Beamsplitter coatings are used to separate or maintain polarization in monochromatic beams. Polarizing Cube Beamsplitters split unpolarized beams into S and P components with a high extinction ratio (>1000:1), while Thin Film Plate Polarizers operate at Brewster’s angle with a ratio over 200:1.

Non-Polarizing Cube and Plate Beamsplitters maintain polarization and divide beams with a specified intensity ratio. All coatings are sensitive to wavelength and angle of incidence and are highly resistant to laser damage.

Polarizing and Non-Polarizing Beamsplitter coatings

193 nm ≤ λ ≤ 400 nm

Dichroic Filter coatings are designed to transmit one spectral region (passband) and reflect another (rejection band).

The filter is a Short Wave Pass (SWP) if the passband is to the left of the transition slope, and a Long Wave Pass (LWP) if the passband is to the right of the slope.

The advantages of Dichroic Filters over Colored Glass Filters are:

The rejection band is reflected rather than absorbed.
Steeper transition slope between the passband and the rejection band; i.e. sharper cut-on or cut-off.
Coatings can be custom designed for specific center wavelengths.