

Ultraviolet Optics

High-Performance UV Optics for Semiconductor, Micromachining & Medical
RMI’s ultraviolet optics are engineered for demanding environments in medical diagnostics, semiconductor photolithography, and scientific spectroscopy. Designed for optimal transmission and durability across the UV and Deep UV spectrum, our components deliver accurate, repeatable results from 193nm to 355nm.
RMI Ultraviolet Solutions

Materials
CaF₂, UV-grade fused silica, BaF₂, MgF₂, Sapphire
Coatings
Custom coatings for 193nm, 248nm, 308nm, 355nm; Excimer laser coatings for 193nm
Quality Systems
Low fluorescence, low scatter surfaces; Cleanroom handling & packaging
Assemblies
Optical design & engineering; UV lens assemblies; Custom opto-mechanical solutions

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Deep UV (DUV) steppers and scanners for integrated circuit (IC) production
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High-resolution wafer inspection and UV-enhanced metrology systems
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Precision mask alignment and overlay registration control
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Thin-film monitoring for layer uniformity and process optimization
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Advanced packaging and chip-scale optical integration platforms

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Medical Devices: Stents, implants, surgical instruments, and diagnostic chips
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Aerospace & Defense: Micro nozzles, sensor housings, and optical alignment structures
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Electronics & Semiconductors: Lead frames, micro connectors, and circuit patterns
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Photonics & Optics: Fiber alignment fixtures, tiny apertures, and diffractive elements
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Watchmaking & Jewelry: Intricate patterns, engraving, and ultra-fine casing details

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UV-C sterilization for pathogen inactivation and surface decontamination
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High-resolution endoscopic and microscopic imaging systems
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UV-integrated diagnostics and point-of-care instrumentation
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Photonic disinfection systems for clinical and pharmaceutical settings
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Fluorescence and Raman-based imaging for cellular and tissue analysis